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Beyond the Current Horizontal of Silicon Thin Film Technology: Light-Soaking Free Nano-Crystal Embedded Polymorphous Silicon Thin Film and TFT by Neutral Beam Assisted CVD at Room Temperature

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dc.contributor.authorHong MunPyo-
dc.date.accessioned2021-08-29T19:44:45Z-
dc.date.available2021-08-29T19:44:45Z-
dc.date.created2021-04-22-
dc.date.issued2012-10-09-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/45488-
dc.publisherthe Eletrochemical Society of Japan-
dc.titleBeyond the Current Horizontal of Silicon Thin Film Technology: Light-Soaking Free Nano-Crystal Embedded Polymorphous Silicon Thin Film and TFT by Neutral Beam Assisted CVD at Room Temperature-
dc.typeConference-
dc.contributor.affiliatedAuthorHong MunPyo-
dc.identifier.bibliographicCitationPRiME 2012-
dc.relation.isPartOfPRiME 2012-
dc.relation.isPartOfPRiME 2012-
dc.citation.titlePRiME 2012-
dc.citation.conferencePlaceUS-
dc.citation.conferencePlace327,Level3, Hawaii Convention Center-
dc.citation.conferenceDate2012-10-07-
dc.type.rimsCONF-
dc.description.journalClass1-
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