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Effects of neutral particle beam on nano-crystalline silicon thin film deposited by using neutral beam assisted chemical vapor deposition at room temperature for the thin film transistor
- Authors
- Hong MunPyo
- Issue Date
- 4-7월-2012
- Publisher
- ICMAP 2012 (The 8th International Conference on Microelectronics and Plasma Technology)
- Citation
- ICMAP 2012 (The 8th International Conference on Microelectronics and Plasma Technology)
- Conference Name
- ICMAP 2012 (The 8th International Conference on Microelectronics and Plasma Technology)
- Place
- KO
- Conference Date
- 2012-07-04
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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