New approaches for highly doped polymorphous silicon thin film with homogeneously embedded nano-crystalline by using neutral beam assisted chemical vapor deposition system at near room temperature
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Hong MunPyo | - |
dc.date.accessioned | 2021-08-29T20:49:26Z | - |
dc.date.available | 2021-08-29T20:49:26Z | - |
dc.date.created | 2021-04-22 | - |
dc.date.issued | 2012-01-31 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/46192 | - |
dc.publisher | FCT, i3N | - |
dc.title | New approaches for highly doped polymorphous silicon thin film with homogeneously embedded nano-crystalline by using neutral beam assisted chemical vapor deposition system at near room temperature | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | Hong MunPyo | - |
dc.identifier.bibliographicCitation | ITC 2012 ? 8th International Thin-Film Transistor Conference | - |
dc.relation.isPartOf | ITC 2012 ? 8th International Thin-Film Transistor Conference | - |
dc.relation.isPartOf | ITC 2012 ? 8th International Thin-Film Transistor Conference | - |
dc.citation.title | ITC 2012 ? 8th International Thin-Film Transistor Conference | - |
dc.citation.conferencePlace | PO | - |
dc.citation.conferencePlace | Lisbon, Portugal | - |
dc.citation.conferenceDate | 2012-01-30 | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 1 | - |
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