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Effect of DC Sputtering Parameter of Molybdenum on Galvanic Reaction between Molybdenum and Copper Thin Films in Phosphoric Acid Solution

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dc.contributor.authorHong MunPyo-
dc.date.accessioned2021-08-29T20:51:44Z-
dc.date.available2021-08-29T20:51:44Z-
dc.date.created2021-04-22-
dc.date.issued2011-12-08-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/46243-
dc.publisherITE, SID-
dc.titleEffect of DC Sputtering Parameter of Molybdenum on Galvanic Reaction between Molybdenum and Copper Thin Films in Phosphoric Acid Solution-
dc.typeConference-
dc.contributor.affiliatedAuthorHong MunPyo-
dc.identifier.bibliographicCitationIDW'11(THE 20TH INTERNATIONAL DISPLAY WORKSHOPS)-
dc.relation.isPartOfIDW'11(THE 20TH INTERNATIONAL DISPLAY WORKSHOPS)-
dc.relation.isPartOfIDW'11(THE 18TH INTERNATIONAL DISPLAY WORKSHOPS)-
dc.citation.titleIDW'11(THE 20TH INTERNATIONAL DISPLAY WORKSHOPS)-
dc.citation.conferencePlaceJA-
dc.citation.conferenceDate2011-12-07-
dc.type.rimsCONF-
dc.description.journalClass1-
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