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Development of a High Quality Nanolaminate Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process

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dc.contributor.authorHong MunPyo-
dc.date.accessioned2021-08-29T20:53:09Z-
dc.date.available2021-08-29T20:53:09Z-
dc.date.created2021-04-22-
dc.date.issued2011-11-28-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/46274-
dc.publisherMATERIALS RESEARCH SOCIETY-
dc.titleDevelopment of a High Quality Nanolaminate Single Gas Barrier Layer by Neutral Beam Assisted Sputtering (NBAS) Process-
dc.typeConference-
dc.contributor.affiliatedAuthorHong MunPyo-
dc.identifier.bibliographicCitation2011 MRS Fall MEETING-
dc.relation.isPartOf2011 MRS Fall MEETING-
dc.relation.isPartOf2011 MRS Fall MEETING-
dc.citation.title2011 MRS Fall MEETING-
dc.citation.conferencePlaceUS-
dc.citation.conferenceDate2011-11-27-
dc.type.rimsCONF-
dc.description.journalClass1-
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