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Improvement of Room Temperature Processed High Quality TCO Thin Film Using the DC/RF Superimposed Magnetic Field Shielded Sputtering (MFSS) Process
- Authors
- Hong MunPyo
- Issue Date
- 28-11월-2011
- Publisher
- MATERIALS RESEARCH SOCIETY
- Citation
- 2011 MRS Fall MEETING
- Conference Name
- 2011 MRS Fall MEETING
- Place
- US
- Conference Date
- 2011-11-27
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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