Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Effect of plasma treatment in Cu CVD thin film growth using the Cu(dmamb)2Effect of plasma treatment in Cu CVD thin film growth using the Cu(dmamb)2
- Alternative Title
- Effect of plasma treatment in Cu CVD thin film growth using the Cu(dmamb)2
- Authors
- BYUN, Dong Jin
- Issue Date
- 24-8월-2010
- Publisher
- MRS KOREA
- Citation
- International Conference on Electronic Materials 2010 presented by International Union of Material Research Societies
- Conference Name
- International Conference on Electronic Materials 2010 presented by International Union of Material Research Societies
- Place
- KO
- Conference Date
- 2010-08-22
- Files in This Item
- There are no files associated with this item.
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.