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Effect of hydrogen atmosphere in Cu thin film by chemical vapor deposition using Cu(dmamb)2Effect of hydrogen atmosphere in Cu thin film by chemical vapor deposition using Cu(dmamb)2
- Alternative Title
- Effect of hydrogen atmosphere in Cu thin film by chemical vapor deposition using Cu(dmamb)2
- Authors
- BYUN, Dong Jin
- Issue Date
- 29-6월-2010
- Publisher
- The Korean Physical Society
- Citation
- The 7th Asian Meeting on Ferroelectricity and the 7th Asian Meeting on ElectroCeramics
- Conference Name
- The 7th Asian Meeting on Ferroelectricity and the 7th Asian Meeting on ElectroCeramics
- Place
- KO
- Conference Date
- 2010-06-28
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