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Design and Fabrication of Low-Voltage Twisting-Type Thermal Actuators for Micromirrors
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KWON, Oh Myoung | - |
| dc.date.accessioned | 2021-08-29T22:50:34Z | - |
| dc.date.available | 2021-08-29T22:50:34Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2009-12-20 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/47413 | - |
| dc.publisher | American Society Of Mechanical Engineers | - |
| dc.subject | Micromirror, Bimorph Thermal Actuator, Twisting actuation, MEMS Fabrication | - |
| dc.title | Design and Fabrication of Low-Voltage Twisting-Type Thermal Actuators for Micromirrors | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | KWON, Oh Myoung | - |
| dc.identifier.bibliographicCitation | ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference | - |
| dc.relation.isPartOf | ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference | - |
| dc.citation.title | ASME 2009 Micro/Nanoscale Heat and Mass Transfer International Conference | - |
| dc.citation.conferencePlace | CC | - |
| dc.citation.conferencePlace | Renaissance Shanghai Zhongshan Park Hotel, Shanghai, China | - |
| dc.citation.conferenceDate | 2009-12-18 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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