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두께 및 상에 따른 Ge2Sb2Te5 박막의 열전도도 변화 및 Ge2Sb2Te5 - TiN박막간 계면열저항 계측

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dc.contributor.authorKWON, Oh Myoung-
dc.date.accessioned2021-08-29T23:56:33Z-
dc.date.available2021-08-29T23:56:33Z-
dc.date.created2021-04-22-
dc.date.issued2009-11-06-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/48138-
dc.publisher대한기계학회-
dc.subjectPhase change memory(상변화메모리), Film thermal conductivity(박막 열전도도) Thermal boundary resistance(계면열저항)-
dc.title두께 및 상에 따른 Ge2Sb2Te5 박막의 열전도도 변화 및 Ge2Sb2Te5 - TiN박막간 계면열저항 계측-
dc.title.alternativeThickness and phase dependence of the thermal conductivity of Ge2Sb2Te5 and the thermal boundary resistance between Ge2Sb2Te5 and TiN-
dc.typeConference-
dc.contributor.affiliatedAuthorKWON, Oh Myoung-
dc.identifier.bibliographicCitation대한 기계학회 추계학술대회-
dc.relation.isPartOf대한 기계학회 추계학술대회-
dc.relation.isPartOf대한기계학회 2009 추게학술대회 논문집-
dc.citation.title대한 기계학회 추계학술대회-
dc.citation.conferencePlaceKO-
dc.citation.conferencePlace강원도 용평 리조트-
dc.citation.conferenceDate2009-11-04-
dc.type.rimsCONF-
dc.description.journalClass2-
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공과대학 (기계공학부)
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