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멤브레인 표면 보호막을 적용하여 MEMS 풍향풍속센서의 내환경성 강화에 관한 연구

Authors
Pak, James Jungho
Issue Date
6-11월-2009
Publisher
대한전기학회
Citation
대한전기학회 전기물성 응용부문회 추계학술대회, pp.87 - 88
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/48187
Conference Name
대한전기학회 전기물성 응용부문회 추계학술대회
Place
KO
Conference Date
2009-11-05
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College of Engineering > School of Electrical Engineering > 2. Conference Papers

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공과대학 (전기전자공학부)
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