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Novel Deposition Technology for Nano-Crystalline Silicon Thin film at Low Temperature by Hyper-Thermal Neutral Beam Assisted CVD System
- Authors
- Hong MunPyo
- Keywords
- Hyper thermal, CVD, TFT
- Issue Date
- 15-10월-2009
- Publisher
- Korea Information Display Society (KIDS), Korea Display Industry Association(KDIA), Display Search, and the Society for Information Display (SID).
- Citation
- 2009 International Meeting on Information Display, pp.1025 - 1027
- Conference Name
- 2009 International Meeting on Information Display
- Place
- KINTEX, Seoul, Korea
- Conference Date
- 2009-10-12
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Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
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