Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
The structual and electrical properties of nanocrystalline Si thin films depostied by reactive particle beam assisted chemical vapor deposition process
- Authors
- Hong MunPyo
- Keywords
- Nano Cystalline silicon, CVD
- Issue Date
- 24-9월-2009
- Publisher
- The Korean Vacuum Society
- Citation
- 2nd International Conference on Microelectronics and Plasma Technology, pp.204
- Conference Name
- 2nd International Conference on Microelectronics and Plasma Technology
- Place
- KO
BEXCO, Busan, Korea
- Conference Date
- 2009-09-23
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - Graduate School > Department of Applied Physics > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.