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Investigation of the effects of bottom anti-reflective coating on nanoscale pattems by laser interference lithography
- Authors
- Ju, Byeongkwon
- Issue Date
- 20-9월-2009
- Publisher
- 한국진공학회
- Citation
- ICMAP2009
- Conference Name
- ICMAP2009
- Place
- KO
- Conference Date
- 2009-09-20
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Collections - College of Engineering > School of Electrical Engineering > 2. Conference Papers
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