Optimization of the Atomic Layer Deposition of Ga2O3 Thin Films

Yunsoo Kim

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Optimization of the Atomic Layer Deposition of Ga2O3 Thin Films

Authors: Yunsoo Kim

Issue Date: 16-4월-2009

Publisher: 대한화학회

Citation: 대한화학회 제103회 총회 및 학술발표회

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/51096

Conference Name: 대한화학회 제103회 총회 및 학술발표회

Place: KO
서울 (COEX)

Conference Date: 2009-04-16

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Appears in Collections: College of Science and Technology > Department of Advanced Materials Chemistry > 2. Conference Papers

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