Optimization of the Atomic Layer Deposition of Ga2O3 Thin Films

Yunsoo Kim

Detailed Information

Cited 0 time in webofscience

Cited 0 time in scopus

Metadata Downloads

Optimization of the Atomic Layer Deposition of Ga2O3 Thin Films

Authors: Yunsoo Kim

Issue Date: 16-Apr-2009

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/51096

Place: 대한민국
서울 (COEX)

Conference Date: 2009-04-16 ~ 2009-04-17

Conference Name: 대한화학회 제103회 총회 및 학술발표회

Files in This Item: There are no files associated with this item.

Appears in Collections: College of Science and Technology > Department of Advanced Materials Chemistry > 2. Conference Papers

Show full item record

qrcode

Altmetrics

Total Views & Downloads

RSS_1.0 RSS_2.0 ATOM_1.0

145 Anam-ro, Seongbuk-gu, Seoul, 02841, Korea+82-2-3290-2963

Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.

Detailed Information

Altmetrics

Total Views & Downloads

BROWSE