Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
Exact locating of sub-surface microelectronic structures using scanning thermal-wave microscopy
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KWON, Oh Myoung | - |
| dc.date.accessioned | 2021-08-30T10:10:18Z | - |
| dc.date.available | 2021-08-30T10:10:18Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.date.issued | 2008-12-10 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/52280 | - |
| dc.publisher | SPIE | - |
| dc.title | Exact locating of sub-surface microelectronic structures using scanning thermal-wave microscopy | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | KWON, Oh Myoung | - |
| dc.identifier.bibliographicCitation | SPIE Smart Materials, Nano+Micro-Smart Systems | - |
| dc.relation.isPartOf | SPIE Smart Materials, Nano+Micro-Smart Systems | - |
| dc.relation.isPartOf | Proceeding of SPIE Smart Materials, Nano+Micro-Smart Systems | - |
| dc.citation.title | SPIE Smart Materials, Nano+Micro-Smart Systems | - |
| dc.citation.conferencePlace | AT | - |
| dc.citation.conferencePlace | melbourne, austrailia | - |
| dc.citation.conferenceDate | 2008-12-09 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Department of Mechanical Engineering > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.