BEOL-compatible synthesis of multi -layer graphene by carbon ion implantation on cobalt thin films
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Janghyuk | - |
dc.contributor.author | Kim, Hong-Yeol | - |
dc.contributor.author | Lee, Dongryul | - |
dc.contributor.author | An, Sungjoo | - |
dc.contributor.author | Kim, Jihyun | - |
dc.date.accessioned | 2021-08-30T14:04:59Z | - |
dc.date.available | 2021-08-30T14:04:59Z | - |
dc.date.created | 2021-06-18 | - |
dc.date.issued | 2020-09-15 | - |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/53160 | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | ELSEVIER | - |
dc.subject | ELECTRONIC-PROPERTIES | - |
dc.title | BEOL-compatible synthesis of multi -layer graphene by carbon ion implantation on cobalt thin films | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kim, Jihyun | - |
dc.identifier.doi | 10.1016/j.apsusc.2020.146537 | - |
dc.identifier.scopusid | 2-s2.0-85084283745 | - |
dc.identifier.wosid | 000540435800003 | - |
dc.identifier.bibliographicCitation | APPLIED SURFACE SCIENCE, v.524 | - |
dc.relation.isPartOf | APPLIED SURFACE SCIENCE | - |
dc.citation.title | APPLIED SURFACE SCIENCE | - |
dc.citation.volume | 524 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | ELECTRONIC-PROPERTIES | - |
dc.subject.keywordAuthor | BEOL | - |
dc.subject.keywordAuthor | Cobalt | - |
dc.subject.keywordAuthor | Graphene | - |
dc.subject.keywordAuthor | Ion implantation | - |
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