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BEOL-compatible synthesis of multi -layer graphene by carbon ion implantation on cobalt thin films

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dc.contributor.authorKim, Janghyuk-
dc.contributor.authorKim, Hong-Yeol-
dc.contributor.authorLee, Dongryul-
dc.contributor.authorAn, Sungjoo-
dc.contributor.authorKim, Jihyun-
dc.date.accessioned2021-08-30T14:04:59Z-
dc.date.available2021-08-30T14:04:59Z-
dc.date.created2021-06-18-
dc.date.issued2020-09-15-
dc.identifier.issn0169-4332-
dc.identifier.urihttps://scholar.korea.ac.kr/handle/2021.sw.korea/53160-
dc.languageEnglish-
dc.language.isoen-
dc.publisherELSEVIER-
dc.subjectELECTRONIC-PROPERTIES-
dc.titleBEOL-compatible synthesis of multi -layer graphene by carbon ion implantation on cobalt thin films-
dc.typeArticle-
dc.contributor.affiliatedAuthorKim, Jihyun-
dc.identifier.doi10.1016/j.apsusc.2020.146537-
dc.identifier.scopusid2-s2.0-85084283745-
dc.identifier.wosid000540435800003-
dc.identifier.bibliographicCitationAPPLIED SURFACE SCIENCE, v.524-
dc.relation.isPartOfAPPLIED SURFACE SCIENCE-
dc.citation.titleAPPLIED SURFACE SCIENCE-
dc.citation.volume524-
dc.type.rimsART-
dc.type.docTypeArticle-
dc.description.journalClass1-
dc.description.journalRegisteredClassscie-
dc.description.journalRegisteredClassscopus-
dc.relation.journalResearchAreaChemistry-
dc.relation.journalResearchAreaMaterials Science-
dc.relation.journalResearchAreaPhysics-
dc.relation.journalWebOfScienceCategoryChemistry, Physical-
dc.relation.journalWebOfScienceCategoryMaterials Science, Coatings & Films-
dc.relation.journalWebOfScienceCategoryPhysics, Applied-
dc.relation.journalWebOfScienceCategoryPhysics, Condensed Matter-
dc.subject.keywordPlusELECTRONIC-PROPERTIES-
dc.subject.keywordAuthorBEOL-
dc.subject.keywordAuthorCobalt-
dc.subject.keywordAuthorGraphene-
dc.subject.keywordAuthorIon implantation-
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