BEOL-compatible synthesis of multi -layer graphene by carbon ion implantation on cobalt thin films

Kim, Janghyuk; Kim, Hong-Yeol; Lee, Dongryul; An, Sungjoo; Kim, Jihyun

doi:10.1016/j.apsusc.2020.146537

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BEOL-compatible synthesis of multi -layer graphene by carbon ion implantation on cobalt thin films

Authors: Kim, Janghyuk; Kim, Hong-Yeol; Lee, Dongryul; An, Sungjoo; Kim, Jihyun

Issue Date: 15-9월-2020

Publisher: ELSEVIER

Keywords: BEOL; Cobalt; Graphene; Ion implantation

Citation: APPLIED SURFACE SCIENCE, v.524

Indexed: SCIE
SCOPUS

Journal Title: APPLIED SURFACE SCIENCE

Volume: 524

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/53160

DOI: 10.1016/j.apsusc.2020.146537

ISSN: 0169-4332

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Appears in Collections: College of Engineering > Department of Chemical and Biological Engineering > 1. Journal Articles

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