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Atomic Layer Deposition of Ga2O3 Thin Films Using Dimethylgallium Isopropoxide and Water
- Authors
- Yunsoo Kim
- Keywords
- Atomic layer deposition, gallium oxide, dimethylgallium isopropoxide
- Issue Date
- 2-7월-2008
- Publisher
- American Vacuum Society
- Citation
- 8th International Conference on Atomic Layer Deposition (ALD 2008)
- Conference Name
- 8th International Conference on Atomic Layer Deposition (ALD 2008)
- Place
- BE
Bruges (Oud Sint Jan)
- Conference Date
- 2008-06-29
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