A Micromachined Metal Oxide Composite Dual Gas Sensor System for Principal Component Analysis-Based Multi-Monitoring of Noxious Gas Mixtures
DC Field | Value | Language |
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dc.contributor.author | Yang, In-Hwan | - |
dc.contributor.author | Jin, Joon-Hyung | - |
dc.contributor.author | Min, Nam Ki | - |
dc.date.accessioned | 2021-08-31T15:04:17Z | - |
dc.date.available | 2021-08-31T15:04:17Z | - |
dc.date.created | 2021-06-18 | - |
dc.date.issued | 2020-01 | - |
dc.identifier.issn | 2072-666X | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/58497 | - |
dc.description.abstract | Microelectronic gas-sensor devices were developed for the detection of carbon monoxide (CO), nitrogen dioxides (NO2), ammonia (NH3) and formaldehyde (HCHO), and their gas-sensing characteristics in six different binary gas systems were examined using pattern-recognition methods. Four nanosized gas-sensing materials for these target gases, i.e., Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and SnO2-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were fabricated using a microsensor platform. Principal component analysis of the experimental data from the microelectromechanical systems gas-sensor arrays under exposure to single gases and their mixtures indicated that identification of each individual gas in the mixture was successful. Additionally, the gas-sensing behavior toward the mixed gas indicated that the traditional adsorption and desorption mechanism of the n-type metal oxide semiconductor (MOS) governs the sensing mechanism of the mixed gas systems. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | MDPI | - |
dc.subject | SENSING CHARACTERISTICS | - |
dc.subject | HIGH-SENSITIVITY | - |
dc.title | A Micromachined Metal Oxide Composite Dual Gas Sensor System for Principal Component Analysis-Based Multi-Monitoring of Noxious Gas Mixtures | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Min, Nam Ki | - |
dc.identifier.doi | 10.3390/mi11010024 | - |
dc.identifier.scopusid | 2-s2.0-85079392190 | - |
dc.identifier.wosid | 000514309100024 | - |
dc.identifier.bibliographicCitation | MICROMACHINES, v.11, no.1 | - |
dc.relation.isPartOf | MICROMACHINES | - |
dc.citation.title | MICROMACHINES | - |
dc.citation.volume | 11 | - |
dc.citation.number | 1 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Instruments & Instrumentation | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Analytical | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Instruments & Instrumentation | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | SENSING CHARACTERISTICS | - |
dc.subject.keywordPlus | HIGH-SENSITIVITY | - |
dc.subject.keywordAuthor | dual-sensor system | - |
dc.subject.keywordAuthor | microelectromechanical systems | - |
dc.subject.keywordAuthor | metal oxide nanocomposite | - |
dc.subject.keywordAuthor | noxious gas mixture | - |
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