Plasma etch damage가 (100) SOI에 미치는 영향의 C-V 특성 분석
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Moon Byung-Moo | - |
dc.date.accessioned | 2021-08-31T16:35:21Z | - |
dc.date.available | 2021-08-31T16:35:21Z | - |
dc.date.created | 2021-04-22 | - |
dc.date.issued | 2008-04-11 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/59231 | - |
dc.publisher | 한국전기전자재료학회 | - |
dc.title | Plasma etch damage가 (100) SOI에 미치는 영향의 C-V 특성 분석 | - |
dc.title.alternative | C-V Characterization of Plasma Etch-damage Effect on (001) SOI | - |
dc.type | Conference | - |
dc.contributor.affiliatedAuthor | Moon Byung-Moo | - |
dc.identifier.bibliographicCitation | 2008년도 한국전기전자재료학회 춘계학술대회 | - |
dc.relation.isPartOf | 2008년도 한국전기전자재료학회 춘계학술대회 | - |
dc.relation.isPartOf | 2008년도 한국전기전자재료학회 춘계학술대회 논문집 | - |
dc.citation.title | 2008년도 한국전기전자재료학회 춘계학술대회 | - |
dc.citation.conferencePlace | KO | - |
dc.citation.conferencePlace | 고려대학교 | - |
dc.citation.conferenceDate | 2008-04-11 | - |
dc.type.rims | CONF | - |
dc.description.journalClass | 2 | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.