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Plasma etch damage가 (100) SOI에 미치는 영향의 C-V 특성 분석C-V Characterization of Plasma Etch-damage Effect on (001) SOI
- Alternative Title
- C-V Characterization of Plasma Etch-damage Effect on (001) SOI
- Authors
- Moon Byung-Moo
- Issue Date
- 11-4월-2008
- Publisher
- 한국전기전자재료학회
- Citation
- 2008년도 한국전기전자재료학회 춘계학술대회
- Conference Name
- 2008년도 한국전기전자재료학회 춘계학술대회
- Place
- KO
고려대학교
- Conference Date
- 2008-04-11
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Collections - College of Engineering > School of Electrical Engineering > 2. Conference Papers
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