금속 Zn타겟을 사용한 RF마그네트론 리엑티브 스퍼터링 ZnO의 온도 및 산소분압에 따른 전기적 특성의 변화

BYUN, Dong Jin

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금속 Zn타겟을 사용한 RF마그네트론 리엑티브 스퍼터링 ZnO의 온도 및 산소분압에 따른 전기적 특성의 변화

Authors: BYUN, Dong Jin

Publisher: 한국재료학회

Citation: 2009년도 한국재료학회 춘계학술발표대회 및 제 16회 신소재 심포지엄

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/64490

Conference Name: 2009년도 한국재료학회 춘계학술발표대회 및 제 16회 신소재 심포지엄

Place: KO

Conference Date: 2009-05-21

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Appears in Collections: College of Engineering > Department of Materials Science and Engineering > 2. Conference Papers

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