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FEM(Finite Element Method)를 이용한 CMP(Chemical Mechanical Process)공정 시뮬레이션과 Run-to-Run 제어기법에 관한 연구
- Authors
- KIM SUNG SHICK
- Publisher
- 한국경영과학회/대한산업공학회
- Citation
- 2009 한국경영과학회/대한산업공학회 춘계공동학술대회
- Conference Name
- 2009 한국경영과학회/대한산업공학회 춘계공동학술대회
- Place
- KO
- Conference Date
- 2009-05-22
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