Study of adaptive model predictive control algorithm for efficient control of semiconductor process

KIM SUNG SHICK

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Study of adaptive model predictive control algorithm for efficient control of semiconductor process

Authors: KIM SUNG SHICK

Publisher: AEC/APC

Citation: AEC/APC Symposium ASIA 2009

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/64961

Conference Name: AEC/APC Symposium ASIA 2009

Place: JA

Conference Date: 2009-11-10

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Appears in Collections: College of Engineering > School of Industrial and Management Engineering > 2. Conference Papers

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