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Passivation quality control in poly-Si/SiOx/c-Si passivated contact solar cells with 734 mV implied open circuit voltage

Authors
Park, HyunJungPark, HyominPark, Se JinBae, SoohyunKim, HyunhoYang, Jee WoongHyun, Ji YeonLee, Chang HyunShin, Seung HyunKang, YoonmookLee, Hae-SeokKim, Donghwan
Issue Date
1월-2019
Publisher
ELSEVIER SCIENCE BV
Keywords
Polysilicon; Tunnel oxide; Passivated contact; N-type silicon; High efficiency; Solar cell
Citation
SOLAR ENERGY MATERIALS AND SOLAR CELLS, v.189, pp.21 - 26
Indexed
SCIE
SCOPUS
Journal Title
SOLAR ENERGY MATERIALS AND SOLAR CELLS
Volume
189
Start Page
21
End Page
26
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/68807
DOI
10.1016/j.solmat.2018.09.013
ISSN
0927-0248
Abstract
Passivation quality of poly-Si contacts with different phosphorus doping concentration were investigated in this study. Intrinsic poly-Si layers were deposited by LPCVD on a tunnel oxide surface, followed by n + poly-Si doping and hydrogenation. For lightly doped poly-Si contacts with phosphorus concentration of 2.1 x 10(19) cm(-3), higher temperatures and longer times increased iV(oc) achieving maximum value of 734 mV, as poly-Si grain size increases from 13 nm to 40 nm. However, for heavily doped poly-Si contacts with phosphorus concentration of 1.1 x 10(20)cm(-3), iV(oc) decreased from 731 mV to 696 mV as annealing time increased from 10 to 60 min because Auger recombination rate increased from 9.3 fA/cm(2) to 21.6 fA/cm(2) as phosphorus in-diffusion occurs. The contact resistance of poly-Si contacts was also investigated to achieve a high fill factor. Finally, a poly-Si/SiOx/c-Si passivated contact solar cell using a poly-Si contact on the back and boron diffused emitter on the front was fabricated. As a result, high efficiency of 21.1% solar cell was achieved with V-oc of 665 mV, J(sc) of 40.6 mA/cm(2), and fill factor of 78.3%.
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Graduate School of Energy and Environment (KU-KIST GREEN SCHOOL) > Department of Energy and Environment > 1. Journal Articles
College of Engineering > Department of Materials Science and Engineering > 1. Journal Articles

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공과대학 (신소재공학부)
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