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Electrical Characteristics of Silicon Nitride Film Stress in Passivation Process of AlGaN/GaN Heterojunction Field-Effect Transistors on Silicon Substrate
- Authors
- PARK, JUNG HO
- Publisher
- 사단법인 LED반도체조명학회
- Citation
- 8th International Conference on Nitride Semiconductors
- Conference Name
- 8th International Conference on Nitride Semiconductors
- Place
- KO
제주
- Conference Date
- 2009-10-18
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Collections - College of Engineering > School of Electrical Engineering > 2. Conference Papers
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