Structural Properties of Silicon Implanted with Unfiltered Boron Plasma Ions
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Hyomin | - |
dc.contributor.author | Park, Sungeun | - |
dc.contributor.author | Park, Se Jin | - |
dc.contributor.author | Kang, Yoonmook | - |
dc.contributor.author | Lee, Hae-Seok | - |
dc.contributor.author | Kim, Donghwan | - |
dc.date.accessioned | 2021-09-02T02:31:13Z | - |
dc.date.available | 2021-09-02T02:31:13Z | - |
dc.date.created | 2021-06-19 | - |
dc.date.issued | 2018-12 | - |
dc.identifier.issn | 1555-130X | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/71373 | - |
dc.description.abstract | The structural damage of silicon substrates implanted with unfiltered boron plasma ions and energy-massselective boron ions were investigated. Silicon substrates implanted with boron plasma ions showed higher boron concentration near the surface. Those higher concentration was associated with fully amorphization near the silicon surface. On the contrast, silicon substrates implanted with energy- and mass selected boron ions exhibited buried amorphization near the surface. In silicon implanted with unfiltered plasma ions, a large amount of hydrogen species was co-implanted during the process and generated hydrogen-related damage under the amorphized region. After the solid phase epitaxial regrowth, most of the hydrogen-related damage was annealed out, and extended boron defects were observed in the nearby projected range. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | AMER SCIENTIFIC PUBLISHERS | - |
dc.subject | INTERSTITIAL CLUSTERS | - |
dc.subject | DIFFUSION | - |
dc.subject | KINETICS | - |
dc.subject | SI | - |
dc.title | Structural Properties of Silicon Implanted with Unfiltered Boron Plasma Ions | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kang, Yoonmook | - |
dc.contributor.affiliatedAuthor | Lee, Hae-Seok | - |
dc.contributor.affiliatedAuthor | Kim, Donghwan | - |
dc.identifier.doi | 10.1166/jno.2018.2399 | - |
dc.identifier.wosid | 000454144700008 | - |
dc.identifier.bibliographicCitation | JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS, v.13, no.12, pp.1793 - 1796 | - |
dc.relation.isPartOf | JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | - |
dc.citation.title | JOURNAL OF NANOELECTRONICS AND OPTOELECTRONICS | - |
dc.citation.volume | 13 | - |
dc.citation.number | 12 | - |
dc.citation.startPage | 1793 | - |
dc.citation.endPage | 1796 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.relation.journalResearchArea | Engineering | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Engineering, Electrical & Electronic | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | INTERSTITIAL CLUSTERS | - |
dc.subject.keywordPlus | DIFFUSION | - |
dc.subject.keywordPlus | KINETICS | - |
dc.subject.keywordPlus | SI | - |
dc.subject.keywordAuthor | Boron Molecular Ion Implantation | - |
dc.subject.keywordAuthor | Unfiltered Plasma Ions | - |
dc.subject.keywordAuthor | Boron Emitter | - |
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
(02841) 서울특별시 성북구 안암로 14502-3290-1114
COPYRIGHT © 2021 Korea University. All Rights Reserved.
Certain data included herein are derived from the © Web of Science of Clarivate Analytics. All rights reserved.
You may not copy or re-distribute this material in whole or in part without the prior written consent of Clarivate Analytics.