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Enhanced Performance and SRAM Stability in FinFET with Reduced Process Steps for Source/Drain Doping

Authors
Ji-Woon Yang
Publisher
Industrial Technology Research Institute (ITRI)
Citation
IEEE International Symposium on VLSI Technology, System, and Applications
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/71629
Conference Name
IEEE International Symposium on VLSI Technology, System, and Applications
Place
CH
Conference Date
2008-04-21
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Graduate School > Department of Electronics and Information Engineering > 2. Conference Papers

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