Effect of physical densification on sub-gap density of states in amorphous InGaZnO thin films
DC Field | Value | Language |
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dc.contributor.author | Oh, Hyungon | - |
dc.contributor.author | Cho, Kyoungah | - |
dc.contributor.author | Kim, Sangsig | - |
dc.date.accessioned | 2021-09-02T07:26:32Z | - |
dc.date.available | 2021-09-02T07:26:32Z | - |
dc.date.created | 2021-06-16 | - |
dc.date.issued | 2018-09 | - |
dc.identifier.issn | 0749-6036 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/73650 | - |
dc.description.abstract | In this study, we investigate the relationship between the physical densification and sub-gap density-of-states (DOS) distribution of a-IGZO films prepared under various deposition pressures. For TFTs with a-IGZO channel films, the field effect mobility increases from 10.9 to 24.8 cm(2)/V.s, and the on-current increases from 1.5 to 20.8 mu A as the deposition pressure for the channel films decreases from 7 to 1 mTorr. The sub-gap DOS distributions obtained from the electrical characteristics indicate the changes in the density of accepter-like tail states with deposition pressure. Further, the physical densification of the channel films increases as the deposition pressure decreases. Our study demonstrates that the lower density of accepter-like tail states and the higher physical densification contribute to the improved performance of a-IGZO TFTs. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | ACADEMIC PRESS LTD- ELSEVIER SCIENCE LTD | - |
dc.subject | PERFORMANCE | - |
dc.title | Effect of physical densification on sub-gap density of states in amorphous InGaZnO thin films | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Cho, Kyoungah | - |
dc.contributor.affiliatedAuthor | Kim, Sangsig | - |
dc.identifier.doi | 10.1016/j.spmi.2018.07.021 | - |
dc.identifier.scopusid | 2-s2.0-85053222672 | - |
dc.identifier.wosid | 000444931200005 | - |
dc.identifier.bibliographicCitation | SUPERLATTICES AND MICROSTRUCTURES, v.121, pp.33 - 37 | - |
dc.relation.isPartOf | SUPERLATTICES AND MICROSTRUCTURES | - |
dc.citation.title | SUPERLATTICES AND MICROSTRUCTURES | - |
dc.citation.volume | 121 | - |
dc.citation.startPage | 33 | - |
dc.citation.endPage | 37 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | PERFORMANCE | - |
dc.subject.keywordAuthor | a-IGZO TFT | - |
dc.subject.keywordAuthor | Deposition pressure | - |
dc.subject.keywordAuthor | Film density | - |
dc.subject.keywordAuthor | Density of states | - |
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