DeepNAP: Deep neural anomaly pre-detection in a semiconductor fab

Abstract

Anomaly detection in an industrial process is crucial for preventing unexpected economic loss. Among various signals, multivariate time series signals are one of the most difficult signals to analyze for detecting anomalies. Moreover, labels for anomalous signals are often unavailable in many fields. To tackle this problem, we present DeepNAP which is an anomaly pre-detection model based on recurrent neural networks. Without any annotated data, DeepNAP successfully learns to detect anomalies using partial reconstruction. Furthermore, detecting anomalies in advance is essential for preventing catastrophic events. While previous studies focused mainly on capturing anomalies after they have occurred, DeepNAP is able to pre-detect anomalies. We evaluate DeepNAP and other baseline models on a real multivariate dataset generated from a semiconductor manufacturing fab. Compared with other baseline models, DeepNAP achieves the best performance on both the detection and pre-detection of anomalies. (C) 2018 Elsevier Inc. All rights reserved.