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Microemulsion 방법을 이용한 CMP용 SiO2 나노 연마 입자의 제조
- Authors
- Kwan Young Lee
- Publisher
- Applied Rheology Center
- Citation
- 8th Annual Meeting of the Applied Rheology Center
- Conference Name
- 8th Annual Meeting of the Applied Rheology Center
- Place
- KO
서울
- Conference Date
- 2008-02-12
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