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The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Kwon, Kwang-Ho | - |
| dc.date.accessioned | 2021-09-02T12:04:43Z | - |
| dc.date.available | 2021-09-02T12:04:43Z | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/75779 | - |
| dc.title | The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 1st International Conference on Microelectronics and plasma Technology | - |
| dc.citation.conferencePlace | 대한민국 | - |
| dc.citation.conferencePlace | 서울 | - |
| dc.citation.conferenceDate | 2008-08-18 ~ 2008-08-20 | - |
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- Kwon, Kwang Ho
- Department of Control and Instrumentation Engineering