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The deposition of amorphous carbon thin films for hard mask applications by reactive particle beam assisted sputtering process
- Authors
- Min Nam Ki
- Publisher
- ICMAP 2008
- Citation
- 1st International Conference on Microelectronics and plasma Technology
- Conference Name
- 1st International Conference on Microelectronics and plasma Technology
- Place
- KO
서울
- Conference Date
- 2008-08-18
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