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Design, Fabrication and Characterization of Front-side Dry-Etched Microbridge Structure Thermopile with 3-5 ㎛Infrared Absorber
- Authors
- Min Nam Ki
- Publisher
- DPS 2008
- Citation
- 30th International Symposium on Dry Process
- Conference Name
- 30th International Symposium on Dry Process
- Place
- JA
- Conference Date
- 2008-11-26
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