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A Frontside Dry-Etched Thermopile Detector with 3-5 ㎛ Infrared Absorber for NDIR CO2 Gas Sensors
- Authors
- Min Nam Ki
- Publisher
- APCOT 2008
- Citation
- Asia-Pacific Conference On Transducers and Micro-Nano Technology
- Conference Name
- Asia-Pacific Conference On Transducers and Micro-Nano Technology
- Place
- CH
- Conference Date
- 2008-05-22
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