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Performance analysis and Parametric Design of an Ultra Precision XY Parallel Kinematics Stage Using a Coupled Flexure Leaf Spring Mechanism
- Authors
- Jaehwa Jeong
- Publisher
- The European Society for Precision Engineering and Nanotechnology (euspen)
- Citation
- The 9th International euspen Conference
- Conference Name
- The 9th International euspen Conference
- Place
- SP
- Conference Date
- 2009-06-02
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