High-Speed Capacitive Humidity Sensors Based on Polyimide Thin FilmsLocally Cured  Using MEMS Microhotplate

Min Nam Ki

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High-Speed Capacitive Humidity Sensors Based on Polyimide Thin FilmsLocally Cured Using MEMS Microhotplate

Authors: Min Nam Ki

Publisher: APCOT

Citation: APCOT 2008

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/77562

Conference Name: APCOT 2008

Place: CH

Conference Date: 2008-06-10

Files in This Item: There are no files associated with this item.

Appears in Collections: College of Science and Technology > Department of Electro-Mechanical Systems Engineering > 2. Conference Papers

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