Fabrication of High-Speed Polyimide-based Humidity Sensor       Using Anisotropic and Isotropic Etching With ICP

Min Nam Ki

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Fabrication of High-Speed Polyimide-based Humidity Sensor Using Anisotropic and Isotropic Etching With ICP

Authors: Min Nam Ki

Publisher: 한국 진홍학회

Citation: ICMAP 2008

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/77761

Conference Name: ICMAP 2008

Place: KO

Conference Date: 2008-08-26

Files in This Item: There are no files associated with this item.

Appears in Collections: College of Science and Technology > Department of Electro-Mechanical Systems Engineering > 2. Conference Papers

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