3-5 ㎛ 적외선 흡수체를 가진 전면 건식 식각된 서모파일과 NDIR CO2 가스 센서의 응용

Min Nam Ki

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3-5 ㎛ 적외선 흡수체를 가진 전면 건식 식각된 서모파일과 NDIR CO2 가스 센서의 응용

Authors: Min Nam Ki

Publisher: 대한 전기학회

Citation: 대한전기학회 하계학술대회

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/78182

Conference Name: 대한전기학회 하계학술대회

Place: KO

Conference Date: 2008-07-20

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Appears in Collections: College of Science and Technology > Department of Electro-Mechanical Systems Engineering > 2. Conference Papers

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