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High-Speed, High-Sensitivity Humidity Sensors Based on MEMS Microhotplates
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Min Nam Ki | - |
| dc.date.accessioned | 2021-09-02T16:47:20Z | - |
| dc.date.available | 2021-09-02T16:47:20Z | - |
| dc.date.created | 2021-04-22 | - |
| dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/78328 | - |
| dc.publisher | MRS | - |
| dc.title | High-Speed, High-Sensitivity Humidity Sensors Based on MEMS Microhotplates | - |
| dc.type | Conference | - |
| dc.contributor.affiliatedAuthor | Min Nam Ki | - |
| dc.identifier.bibliographicCitation | MRS 2008 Spring Meeting | - |
| dc.relation.isPartOf | MRS 2008 Spring Meeting | - |
| dc.citation.title | MRS 2008 Spring Meeting | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.conferenceDate | 2008-03-24 | - |
| dc.type.rims | CONF | - |
| dc.description.journalClass | 1 | - |
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