High-Speed, High-Sensitivity Humidity Sensors Based on MEMS Microhotplates

Min Nam Ki

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High-Speed, High-Sensitivity Humidity Sensors Based on MEMS Microhotplates

Authors: Min Nam Ki

Publisher: MRS

Citation: MRS 2008 Spring Meeting

URI: https://scholar.korea.ac.kr/handle/2021.sw.korea/78328

Conference Name: MRS 2008 Spring Meeting

Place: US

Conference Date: 2008-03-24

Files in This Item: There are no files associated with this item.

Appears in Collections: College of Science and Technology > Department of Electro-Mechanical Systems Engineering > 2. Conference Papers

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