K-S검정(Kolmogorov-Smirnov Test)을 응용한 반도체 제조 시스템에서의 불량 원인 분석 방법론

Abstract

Root Cause Analysis of the defect in Manufacturing is the most basic and important work. It is difficult to analyze the cause of defects because the semiconductor process has more than thousands of root cause factors and the data also show non-parametric characteristics with extreme outliers. However, the semiconductor field requires a cause analysis method that is easy, accurate, fast, and capable of interpreting the result so that everyone can understand it. In this study, Modified K-S test (Kolmogorov-Smirnov test), which is a nonparametric test method is applied to fail bit count data obtained from wafer test process. the proposed methodology will help semiconductor engineers analyze the cause of defects easily and intuitively.