일유체 노즐을 이용한 실내 수분무가습 방식 클린룸의 에너지소비량에 관한 실험적 연구

Abstract

For a recent large-scale semiconductor manufacturing plant, the air conditioning energy consumption required to maintain a cleanroom environment accounts for 40~50% of the total energy consumption in the plant. Therefore, the assessment of the air conditioning energy consumption in the cleanroom is critical for reducing energy cost in the plant. Particularly, the energy consumption required to humidify incoming outdoor air in the winter season is generally known to be high. In order to displace the huge energy consumption of steam generators like boilers in a conventional steam humidification type cleanroom, a water spray humidification technique by use of a water spray nozzles can be introduced into the air circulation path inside the cleanroom instead of the steam generators inside the outdoor air conditioning system. In the present study, a twin cleanroom experiment with each outdoor air flow of 2,300 m3/h was conducted to obtain and compare real time electric power consumption structures of a steam humidification type cleanroom and an indoor water spray humidification type cleanroom with one-fluid nozzles. In addition, a numerical calculation was carried out to assess the annual power consumptions of the two types of cleanrooms. It was concluded from the present work that the indoor water spray humidification type cleanroom was more energy-efficient and reduced the annual electric power consumption of the steam humidification type cleanroom by about 27%.