Fabrication of Standard Calibration Samples for Highly Reliable Atomic Force Microscope Measurements
DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Tae Hoon | - |
dc.contributor.author | Park, Ju Hyun | - |
dc.contributor.author | Jeon, Dong Su | - |
dc.contributor.author | Kim, Yong Kyun | - |
dc.contributor.author | Min, Chi Hong | - |
dc.contributor.author | Yu, Jae Heung | - |
dc.contributor.author | Kim, Tae Geun | - |
dc.date.accessioned | 2021-09-03T00:56:18Z | - |
dc.date.available | 2021-09-03T00:56:18Z | - |
dc.date.created | 2021-06-19 | - |
dc.date.issued | 2017-10 | - |
dc.identifier.issn | 1533-4880 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/82122 | - |
dc.description.abstract | We designed and fabricated a micro-electromechanical system based standard calibration sample to be used for performing atomic force microscopic measurements. The conventional calibration sample of atomic force microscope exhibits disadvantages in terms of its long-term reliability and durability owing to its simple and limited pattern shapes and sizes. In this study, we fabricated a sample with three cross patterns on a 2-inch insulating glass wafer employing conductive materials. The pattern was designed with a broader line width (5 mu m) and a lower height (20 nm) as compared with those of conventional calibration samples. The exact dimensions of the standard calibration sample were examined using surface profile, current mapping, surface potential mapping, and electrostatic mapping images recorded with atomic force microscopy. Highly reliable atomic force microscopic data can be acquired using our proposed standard calibration sample. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | AMER SCIENTIFIC PUBLISHERS | - |
dc.subject | CANTILEVERS | - |
dc.title | Fabrication of Standard Calibration Samples for Highly Reliable Atomic Force Microscope Measurements | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Kim, Tae Geun | - |
dc.identifier.doi | 10.1166/jnn.2017.14842 | - |
dc.identifier.scopusid | 2-s2.0-85025603113 | - |
dc.identifier.wosid | 000410615300133 | - |
dc.identifier.bibliographicCitation | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.10, pp.7783 - 7787 | - |
dc.relation.isPartOf | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | - |
dc.citation.title | JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY | - |
dc.citation.volume | 17 | - |
dc.citation.number | 10 | - |
dc.citation.startPage | 7783 | - |
dc.citation.endPage | 7787 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.subject.keywordPlus | CANTILEVERS | - |
dc.subject.keywordAuthor | MEMS Atomic Force Microscope | - |
dc.subject.keywordAuthor | Standard Calibration Sample | - |
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