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Thickness-dependent Schottky barrier height of MoS2 field-effect transistors

Authors
Kwon, JunyoungLee, Jong-YoungYu, Young-JunLee, Chul-HoCui, XuHoned, JamesLee, Gwan-Hyoung
Issue Date
14-5월-2017
Publisher
ROYAL SOC CHEMISTRY
Citation
NANOSCALE, v.9, no.18, pp.6151 - 6157
Indexed
SCIE
SCOPUS
Journal Title
NANOSCALE
Volume
9
Number
18
Start Page
6151
End Page
6157
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/83456
DOI
10.1039/c7nr01501a
ISSN
2040-3364
Abstract
2D semiconductors, including transition metal dichalcogenides (TMDs), have been widely studied recently. However, the device performance is deteriorated due to the significant contact resistance. The contact resistance of MoS2-metal contacts decreases with the thickness of MoS2. We obtained a Schottky barrier height as low as about 70 meV when MoS2 is trilayer-thick. It is important to find the optimal choice of contact metal and layer thickness of MoS2.
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