Full range optical and electrical properties of Zn-doped SnO2 and oxide/metal/oxide multilayer thin films deposited on flexible PET substrate
- Authors
- Cho, Yoonho; Parmar, Narendra S.; Nahm, Sahn; Choi, Ji-Won
- Issue Date
- 15-2월-2017
- Publisher
- ELSEVIER SCIENCE SA
- Keywords
- CCS; TCO; OMO multilayer; SnO2; Doping; Optical and electrical properties
- Citation
- JOURNAL OF ALLOYS AND COMPOUNDS, v.694, pp.217 - 222
- Indexed
- SCIE
SCOPUS
- Journal Title
- JOURNAL OF ALLOYS AND COMPOUNDS
- Volume
- 694
- Start Page
- 217
- End Page
- 222
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/84443
- DOI
- 10.1016/j.jallcom.2016.09.293
- ISSN
- 0925-8388
- Abstract
- As a potential replacement of indium-tin oxide (ITO), Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer transparent conducting electrodes were prepared on the flexible poly ethylene terephthalate (PET) substrates by RF sputtering at room temperature. To find the optimized composition of Zn-doped SnO2 thin film, which will have higher conductivity and transmittance as compared to the undoped SnO2 thin film, an off-axis Continuous Composition Spread (CCS) sputtering method was used. Zn-doped SnO2 thin films have lower resistivity than undoped SnO2 thin films due to excess oxygen vacancies (V-o) and/or zin interstitials (Zn-i) in thin films. The minimum resistivity of thin film was 0.13 Omega cm at optimized 2.43 wt% Zn-doping. Zn-doped SnO2/Ag/Zn-doped SnO2 multilayer thin films were prepared using the optimized composition deposited by an on-axis RF sputter. The multilayer TCO film has the resistivity similar to 5.33 x 10(-5) Omega cm and the average transmittance >85% in the 550 nm wavelength region. (C) 2016 Elsevier B.V. All rights reserved.
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