Sub-5nm nanostructures fabricated by atomic layer deposition using a carbon nanotube template
DC Field | Value | Language |
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dc.contributor.author | Woo, Ju Yeon | - |
dc.contributor.author | Han, Hyo | - |
dc.contributor.author | Kim, Ji Weon | - |
dc.contributor.author | Lee, Seung-Mo | - |
dc.contributor.author | Ha, Jeong Sook | - |
dc.contributor.author | Shim, Joon Hyung | - |
dc.contributor.author | Han, Chang-Soo | - |
dc.date.accessioned | 2021-09-03T22:08:48Z | - |
dc.date.available | 2021-09-03T22:08:48Z | - |
dc.date.created | 2021-06-18 | - |
dc.date.issued | 2016-07-01 | - |
dc.identifier.issn | 0957-4484 | - |
dc.identifier.uri | https://scholar.korea.ac.kr/handle/2021.sw.korea/88093 | - |
dc.description.abstract | The fabrication of nanostructures having diameters of sub-5 nm is very a important issue for bottom-up nanofabrication of nanoscale devices. In this work, we report a highly controllable method to create sub-5 nm nano-trenches and nanowires by combining area-selective atomic layer deposition (ALD) with single-walled carbon nanotubes (SWNTs) as templates. Alumina nano-trenches. having a depth of 2.6 similar to 3.0 nm and SiO2 nano-trenches having a depth of 1.9 similar to 2.2 nm fully guided by the SWNTs have been formed on SiO2/Si substrate. Through infilling ZnO material by ALD in alumina nano-trenches, well-defined ZnO nanowires having a thickness of 3.1 similar to 3.3 nm have been fabricated. In order to improve the electrical properties of ZnO nanowires, as-fabricated ZnO nanowires by ALD were annealed at 350 degrees C in air for 60 min. As a result, we successfully demonstrated that as-synthesized ZnO nanowire using a specific template can be made for various high-density resistive components in the nanoelectronics industry. | - |
dc.language | English | - |
dc.language.iso | en | - |
dc.publisher | IOP PUBLISHING LTD | - |
dc.subject | NANOFLUIDIC DEVICES | - |
dc.subject | THIN-FILMS | - |
dc.subject | DNA | - |
dc.subject | NANOFABRICATION | - |
dc.subject | NANOCHANNELS | - |
dc.subject | TEMPERATURE | - |
dc.subject | SEPARATION | - |
dc.subject | TRANSPORT | - |
dc.subject | SILICA | - |
dc.subject | FLOW | - |
dc.title | Sub-5nm nanostructures fabricated by atomic layer deposition using a carbon nanotube template | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | Woo, Ju Yeon | - |
dc.contributor.affiliatedAuthor | Ha, Jeong Sook | - |
dc.contributor.affiliatedAuthor | Shim, Joon Hyung | - |
dc.contributor.affiliatedAuthor | Han, Chang-Soo | - |
dc.identifier.doi | 10.1088/0957-4484/27/26/265301 | - |
dc.identifier.scopusid | 2-s2.0-84976385460 | - |
dc.identifier.wosid | 000377490700006 | - |
dc.identifier.bibliographicCitation | NANOTECHNOLOGY, v.27, no.26 | - |
dc.relation.isPartOf | NANOTECHNOLOGY | - |
dc.citation.title | NANOTECHNOLOGY | - |
dc.citation.volume | 27 | - |
dc.citation.number | 26 | - |
dc.type.rims | ART | - |
dc.type.docType | Article | - |
dc.description.journalClass | 1 | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Science & Technology - Other Topics | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.subject.keywordPlus | NANOFLUIDIC DEVICES | - |
dc.subject.keywordPlus | THIN-FILMS | - |
dc.subject.keywordPlus | DNA | - |
dc.subject.keywordPlus | NANOFABRICATION | - |
dc.subject.keywordPlus | NANOCHANNELS | - |
dc.subject.keywordPlus | TEMPERATURE | - |
dc.subject.keywordPlus | SEPARATION | - |
dc.subject.keywordPlus | TRANSPORT | - |
dc.subject.keywordPlus | SILICA | - |
dc.subject.keywordPlus | FLOW | - |
dc.subject.keywordAuthor | carbon nanotube | - |
dc.subject.keywordAuthor | ZnO nanowire | - |
dc.subject.keywordAuthor | nanopatterning | - |
dc.subject.keywordAuthor | sub-5 nm | - |
dc.subject.keywordAuthor | atomic layer deposition | - |
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