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On the reduced electrical conductivity of radio-frequency sputtered doped ceria thin film by elevating the substrate temperature

Authors
Ji, SanghoonAn, JihwanJang, Dong YoungJee, YoungseokShim, Joon HyungCha, Suk Won
Issue Date
3월-2016
Publisher
ELSEVIER SCIENCE BV
Keywords
Electrical conductivity; Gadolinium-doped ceria; Substrate temperature; Radio frequency sputtering; Solid oxide fuel cell
Citation
CURRENT APPLIED PHYSICS, v.16, no.3, pp.324 - 328
Indexed
SCIE
SCOPUS
KCI
Journal Title
CURRENT APPLIED PHYSICS
Volume
16
Number
3
Start Page
324
End Page
328
URI
https://scholar.korea.ac.kr/handle/2021.sw.korea/89384
DOI
10.1016/j.cap.2015.12.011
ISSN
1567-1739
Abstract
The electrical conductivity of similar to 200 nm-thick gadolinium-doped ceria (GDC) thin films deposited at various substrate temperatures by radio-frequency sputtering was evaluated in a temperature range of 400 degrees C-550 degrees C as an electrolyte for solid oxide fuel cells operated at low temperatures. Morphological, chemical, and crystalline properties were discussed to determine the electrical conductivity; in particular, the electrical conductivity of GDC thin film deposited at 300 degrees C was appreciably lower than that of GDC thin film deposited at 150 degrees C. The columnar grain boundaries and the reduced ceria formed during the sputtering process are considered as the major factors leading to the measured results. (C) 2015 Elsevier B.V. All rights reserved.
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