Period-chirped gratings fabricated by laser interference lithography with a concave Lloyd's mirror
- Authors
- Kim, Hanbit; Jung, Hyunho; Lee, Dong-Hyun; Lee, Kyu Back; Jeon, Heonsu
- Issue Date
- 10-1월-2016
- Publisher
- OPTICAL SOC AMER
- Citation
- APPLIED OPTICS, v.55, no.2, pp.354 - 359
- Indexed
- SCIE
SCOPUS
- Journal Title
- APPLIED OPTICS
- Volume
- 55
- Number
- 2
- Start Page
- 354
- End Page
- 359
- URI
- https://scholar.korea.ac.kr/handle/2021.sw.korea/89814
- DOI
- 10.1364/AO.55.000354
- ISSN
- 1559-128X
- Abstract
- We developed a laser interference lithography (LIL) system for fabrication of period-chirped gratings, which would be useful for sophisticated optical components. Despite its simplicity, the developed LIL system, based on a Lloyd's mirror interferometer with a cylindrically concave mirror, can generate chirped gratings, yet over a large area at high throughput owing to the nature of LIL. We have derived exact theoretical equations needed for system design, built the LIL system, and subsequently realized period-chirped gratings. A fabricated sample whose center period is Lambda approximate to 600 nm exhibits a continuous period variation of Delta Lambda = 92 nm across 17 mm width. (C) 2016 Optical Society of America
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